Superior Layer Performance
MKS SurePower® RF Generators provide reliable solid-state power for thin-film, solar cell processing equipment. Our generators offer the highest delivered power (from 3.5kW to 15.0kW and higher) in a compact chassis with extra headroom for process flexibility, and excellent reliability for improved tool uptime. MKS RF generators, combined with our impedance matching networks and our V/I Probe® impedance analyzers, form complete RF delivery systems for the most demanding thin film applications.
Visit www.mksinst.com for product details and data sheets.
Need Help? Contact an Applications Specialist by sending an email to [email protected] or call 978-645-5500.
