A stylus-type profiler from Veeco Metrology Group, the Dektak V 200-Si
A stylus-type profiler from Veeco Metrology Group, the Dektak V 200-Si, is aimed at measuring step heights on thin-film head wafers, sliders, and tape, along with surface texture and dub-off on hard disks. Because a stylus profiler`s data is unaffected by the opacity or reflectivity of a film, it`s used for measuring the thickness of transparent films such as diamond-like coatings on thin-film heads and sliders. The system features typical step height repeatability of 6 angstroms, 1 sigma to measure even the thinnest films.