Submicron alignment stage for laser drilling, semiconductor inspection, and 3D printing introduced by OES

Questions and answers:

• What applications is the AU200-50x50 open-aperture alignment stage designed for? Semiconductor wafer inspection, laser drilling, medical diagnostics, calibration, 3D printing, and alignment tasks.
• What are the key precision features of the AU200-50x50 alignment stage? 50-by-50-millimeter linear travel, resolution options of 5 or 0.5 microns, 1.5-micron repeatability, and preloaded V-groove and crossed roller bearings for high stiffness and precision.
• How can users adjust or enhance the movement control of the stage? The stage includes manual adjustment knobs on the stepper motors, which can be replaced with optical encoders, and is compatible with multi-axis motion controllers.

VAN NUYS, Calif. – Optimal Engineering Systems Inc. (OES) in Van Nuys, Calif., is introducing the submicron AU200-50x50 open-aperture alignment stage for semiconductor wafer inspection, laser drilling, medical diagnostic devices, calibration, 3D printing, and alignment.

The AU200-50x50 has a 90-by-90-millimeter submicron open aperture with 50-by-50-millimeter linear travel of the X and Y axes. The resolution of each axis is 5 microns or 0.5 microns, and the repeatability is 1.5 microns.

The 1-millimeters per-turn lead screws and preloaded V-groove and crossed roller bearings contribute to the high precision and stiffness of the AU200-50x50 open-aperture alignment stage.

Threaded mounting for adding tools

The XY table measures 155-millimeters by 155-millimeters and features a precision pattern of drilled and threaded mounting holes for adding tooling or fixtures. This low-profile black anodized aluminum XY stage is easy to integrate into new or existing systems.

The two-phase stepper motors have knobs for manual adjustments of each axis, yet the knobs can be replaced with 500 cycle-per-revolution quadrature optical encoders for position verification.

Compatible multi-axis motion controllers also are available from OES and the AU200-50x50 Open Aperture Alignment Stage can be ordered as a complete plug-and-play system. For more information contact Optimal Engineering Systems online at www.oesincorp.com.