PROVIDENCE, R.I. - Mahr Inc. in Providence, R.I., has introduced the MarSurf3D MS optical metrology platform, a multisensor surface measurement system that combines confocal, white light interferometry, and focus variation technologies in a single instrument for dimensional and surface inspection applications.

The MarSurf3D MS is designed to enable manufacturers to configure a single measurement platform for a range of inspection requirements without switching between dedicated instruments. The system supports real-time measurements with sub-nanometer vertical resolution using three area-based optical measurement methods.

The platform's LED confocal sensor uses patented multi-pinhole technology to capture high-speed images while providing nanometer-scale repeatability across a variety of surface conditions. An integrated white light interferometry sensor provides sub-nanometer vertical resolution for measuring step heights and low-roughness surfaces, while a focus variation sensor with active lighting is designed for measuring rough surfaces, steep features up to 86 degrees, and large vertical height ranges in a single scan.

The MarSurf3D MS is available with multiple axis configurations, including the portable MX3050 with 50 x 50 x 35 mm XYZ travel, the SX3200 with 200 x 200 x 75 mm travel, and the GS3501 with 500 x 400 x 100 mm travel.

According to Mahr, the platform can be deployed in laboratory, quality assurance, and production environments to inspect structured, rough, and smooth surfaces, as well as layer thicknesses, steep flanks, and components with large height variations.

The system also supports automated measurement workflows intended to improve throughput and repeatability. Additional features include material-independent measurement capability for reflective, absorbent, opaque, and transparent materials, guided measurement software, automated measurement protocols, and data documentation for traceability.

For more information, please visit https://www.mahr.com.