High-Performance MEMS Mirrors
MEMS Mirrors
Avantier’s MEMS mirrors (Micro-Electro-Mechanical Systems mirrors) are compact, fast, and precise optical MEMS devices designed for dynamic beam steering, scanning, and light modulation. Using micro-scale actuation mechanisms, MEMS mirrors can tilt or rotate at high speeds with low power consumption. These miniature mirrors are ideal for next-generation photonic systems requiring agile and accurate optical control.
Engineered with advanced semiconductor processing, our MEMS mirrors offer excellent reliability and performance for a wide range of optical applications.
Key Applications
- LiDAR Systems for autonomous vehicles and robotics – real-time 3D environment scanning
- Optical Communication Networks – signal routing, switching, and alignment
- AR/VR Display Technology – near-eye projection using MEMS beam steering mirrors
- Biomedical Imaging – fast scanning in OCT (optical coherence tomography) and laser-based diagnostics
- Laser Beam Projection – compact MEMS-based image projection for mobile and industrial systems
Structure & Operating Principle
A typical MEMS scanning mirror includes:
- Mirror Surface: Highly reflective silicon or metal-coated element
- Actuation Mechanism: Electrostatic (standard), electromagnetic, or piezoelectric options
- Torsion Springs: Provide controlled angular deflection and fast response
- Support Substrate: Houses the mechanical structure and interface circuitry
How MEMS Mirrors Work
By applying voltage or current to micro-actuators, the mirror tilts or rotates along one or two axes. This allows for high-speed deflection of incident laser beams, enabling precise scanning or tracking. Our MEMS mirrors support angular ranges from ±5° to ±25° with resonant frequencies up to 30 kHz, ensuring rapid response and high positional accuracy. To read the entire article, visit Avantier.