Accelerometer sensors offering high performance dual-axis linear acceleration measurement in a small surface mount package.

Gemini® is our family of integrated MEMS accelerometers. Comprising a dual-axis MEMS sensing device with a dedicated control ASIC in a single ceramic LCC package. The CAS200 series provides two in-plane axes of linear acceleration sensing and is available in five different dynamic ranges.

Precise linear acceleration sensing is achieved by a Silicon MEMS detector forming an orthogonal pair of sprung masses. Each mass provides the moving plate of a variable capacitance formed by an array of interlaced ‘fingers’. This structure also provides critical damping to prevent resonant gain.

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